Controlled fabrication of carbon nanotube NO2 gas sensor using dielectrophoretic impedance measurement
نویسندگان
چکیده
The authors have previously demonstrated an electrokinetic fabrication method of a carbon nanotube (CNT) gas sensor using dielectrophoresis. One advantage of the technique was that one could quantify the amount of trapped nanotubes on a real time basis by monitoring electrical impedance of the sensor (dielectrophoretic impedance measurement, DEPIM). In the present study, we extended the DEPIM technique to controllable assembly of the carbon nanotube gas sensor. This realized a production of CNT gas sensors with identical electrical properties s i w I ©
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